Accurate Sensorless Multistable Microsystem With a Single Actuator

A compact and monolithic multistable microsystem was developed to realize the accurate positioning on microscale by using a single actuator, without any sensors. The mobile part can be maintained in several stable positions at rest with intermediate steps high stability margin each position. Switching between performed both directions one axis actuator. Using mechanical intelligence encoded internal mechanisms, position switched step forward or back initial through activation of Multistable devices were designed fabricated based working principle, their satisfactory operation, effective holding switching two directions, experimentally demonstrated.